Gaya APA
Frühauf, J. (2005).
Shape and Functional Elements of the Bulk Silicon Microtechnique (1st ed.).
Berlin:
Springer.
Gaya MLA
Frühauf, Joachim..
"Shape and Functional Elements of the Bulk Silicon Microtechnique".
1st ed.
Berlin:
Springer,
2005.
E Book.