Gaya APA

Effects of deposition parameters and oxygen addition on properties of sputtered indium tin oxide . (2012). Jakarta: Direktorat Riset & Pengab. Masy UI.

Gaya MLA

Effects of deposition parameters and oxygen addition on properties of sputtered indium tin oxide . . Jakarta: Direktorat Riset & Pengab. Masy UI, 2012. Artikel.