Gaya APA
A New experimental approach to evaluate plasma induced damage in microcantilever. (2013).
Jakarta:
Direktorat Riset & Pengab. Masy UI.
Gaya MLA
A New experimental approach to evaluate plasma induced damage in microcantilever.
.
Jakarta:
Direktorat Riset & Pengab. Masy UI,
2013.
Artikel.