E Book

CCD Image Sensors in Deep-Ultraviolet



Overview of CCD -- CCD Imaging in the Ultraviolet (UV) Regime -- Silicon -- Silicon Dioxide -- Si-SiO2 Interface -- General Effects of Radiation -- Effects of Radiation on CCDs -- UV-Induced Effects in Si -- UV Laser Induced Effects in SiO2 -- UV Laser Induced Effects at the Si-SiO2 Interface -- CCD Measurements at 157nm -- Design Optimizations for Future Research -- Concluding Remarks.As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.


Ketersediaan

9783540274124Koleksi E BookTersedia namun tidak untuk dipinjamkan - Diproses

Informasi Detil

Judul Seri
-
No. Panggil
-
Penerbit Springer : Berlin, Heidelberg.,
Deskripsi Fisik
XII, 232 p. 84 illus.online resource.
Bahasa
English
ISBN/ISSN
9783540274124
Klasifikasi
620.11295
Tipe Isi
-

Informasi Lainnya

Anak judul
Degradation Behavior and Damage Mechanisms
Judul asli
-
DOI/URL
https://doi.org/10.1007/b139047

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Tidak tersedia versi lain




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