Recent Advances in Thin-film Deposition -- Molecular-beam Deposition of High-k Gate Dielectrics for Advanced CMOS -- LEPECVD — A Production Technique for SiGe MOSFETs and MODFETs -- Thin-film Engineering by Atomic-layer Deposition for Ultra-scaled and Novel Devices -- Atomic-layer Deposited Barrier and Seed Layers for Interconnects -- Copper CVD for Conformal Ultrathin-film Deposition -- Push…