Classical Regime for SiO -- Brief Notes on the History of Gate Dielectrics in MOS Devices -- SiO2 Based MOSFETS: Film Growth and Si—SiO2 Interface Properties -- Oxide Reliability Issues -- The Economic Implications of Moore's Law -- Transition to Silicon Oxynitrides -- Gate Dielectric Scaling to 2.0—1.0 nm: SiO2 and Silicon Oxynitride -- Optimal Scaling Methodologies and Transistor Performa…