Atomistic Models -- Lattice Gas Models and Kinetic Monte Carlo Simulations of Epitaxial Growth -- Cluster Diffusion and Island Formation on fcc(111) Metal Surfaces Studied by Atomic Scale Computer Simulations -- A Multiscale Study of the Epitaxial CVD of Si from Chlorosilanes -- Off-lattice Kinetic Monte Carlo Simulations of Strained Heteroepitaxial Growth -- Quasicontinuum Monte Carlo Simulati…