Introductory Remarks -- Fundamentals -- Some Fundamentals of Laser Physics -- Principles of Excimer Lasers -- Design and Technology of Excimer Lasers -- High-Repetition-Rate and High-Power Lasers -- High-Energy Lasers -- Excimer Lasers for Microlithography -- Laser Beam Characterization -- Optical Coatings for Excimer Laser Applications -- Small Structures with Large Excimer Lasers -- Historica…