E Book

Introduction to Focused Ion Beams

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The Focused Ion Beam Instrument -- Ion - Solid Interactions -- Focused Ion Beam Gases for Deposition and Enhanced Etch -- Three-Dimensional Nanofabrication Using Focused Ion Beams -- Device Edits and Modifications -- The Uses of Dual Beam FIB in Microelectronic Failure Analysis -- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy -- FIB for Materials Science Applications - a Review -- Practical Aspects of FIB Tem Specimen Preparation -- FIB Lift-Out Specimen Preparation Techniques -- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method -- Dual-Beam (FIB-SEM) Systems -- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS) -- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy -- Application of FIB in Combination with Auger Electron Spectroscopy.The focused ion beam (FIB) instrument has experienced an intensive period of maturation since its inception. Numerous new techniques and applications have been brought to fruition, and over the past few years, the FIB has gained acceptance as more than just an expensive sample preparation tool. It has taken its place among the suite of other instruments commonly available in analytical and forensic laboratories, universities, geological, medical and biological research institutions, and manufacturing plants. Although the utility of the FIB is not limited to the preparation of specimens for subsequent analysis by other analytical techniques, it has revolutionized the area of TEM specimen preparation. The FIB has also been used to prepare samples for numerous other analytical techniques, and offers a wide range of other capabilities. While the mainstream of FIB usage remains within the semiconductor industry, FIB usage has expanded to applications in metallurgy, ceramics, composites, polymers, geology, art, biology, pharmaceuticals, forensics, and other disciplines. Computer automated procedures have been configured for unattended use of FIB and dual platform instruments. New applications of FIB and dual platform instrumentation are constantly being developed for materials characterization and nanotechnology. The site specific nature of the FIB milling and deposition capabilities allows preparation and processing of materials in ways that are limited only by one's imagination. Introduction to Focused Ion Beams is geared towards techniques and applications. The first portion of this book introduces the basics of FIB instrumentation, milling, and deposition capabilities. The chapter dedicated to ion-solid interactions is presented so that the FIB user can understand which parameters will influence FIB milling behavior. The remainder of the book focuses on how to prepare and analyze samples using FIB and related tools, and presents specific applications and techniques of the uses of FIB milling, deposition, and dual platform techniques. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and Dual platform instruments.

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Ketersediaan

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Informasi Detail

Judul Seri

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No. Panggil

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Penerbit

Boston : Springer., 2005

Deskripsi Fisik

XVIII, 358 p. 193 illus.online resource.

Bahasa

English

ISBN/ISSN

9780387233130

Klasifikasi

530.41

Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

1st ed.

Subjek

Spectroscopy.
Microscopy.
Spectroscopy and Microscopy.
Optical materials.
Electronic materials.
Materials—Surfaces.
Thin films.
Condensed matter.
Optical and Electronic Materials.
Surfaces and Interfaces, Thin Films.
Condensed Matter Physics.
Solid state physics.

Info Detail Spesifik

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Pernyataan Tanggungjawab

Lucille A. Giannuzzi, Fred A. Stevie

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